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《面向機(jī)動(dòng)車污染物排放監(jiān)測(cè)的混合電位式釔穩(wěn)定氧化鋯微型二氧化氮傳感器（英文版）》介紹了氣體傳感器研究的重要進(jìn)展，混合電位的氣體檢測(cè)機(jī)理，固體電解質(zhì)式傳感器的基礎(chǔ)設(shè)計(jì)、分析與制造技術(shù)，對(duì)于電化學(xué)氣敏元件的設(shè)計(jì)、制造及應(yīng)用具有很好的啟示。
《面向機(jī)動(dòng)車污染物排放監(jiān)測(cè)的混合電位式釔穩(wěn)定氧化鋯微型二氧化氮傳感器（英文版）》可供高等院校微電子、微機(jī)電系統(tǒng)、電化學(xué)、精密儀器等專業(yè)的研究人員使用，也可供相關(guān)領(lǐng)域的工程技術(shù)人員參考。

Under the dome, we share the same fate as breathing. The importance of air to human beings is self-evident. Entering the 20th century, with the rapid development of world industry and the sharp increase in population, the number of motor vehi cles keeps increasing. The shortage of resources and the environmental pollution caused by exhaust emissions are becoming increasingly prominent. It has become a severe challenge for the sustainable development of the automobile industry. Nitrogen oxides in exhaust gas are to be blamed because they cause problems such as acid rain, photochemical smog, and ozone hole. They seriously damage the ecological environ ment and endanger human health. Therefore, many countries in the world have put forward strict limit standards for nitrogen oxides emitted from motor vehicle exhaust. It is necessary to accurately measure and control the nitrogen oxides (mainly NO2) produced by automobiles.
　There are many kinds of gas detection methods. Although instrument analysis methods such as gas chromatography, mass spectrum, and spectrum, have high accu racy, they are complicated to be operated, high in cost, and difficult to be integrated. So, they cannot meet the requirements of in-situ detection of automobile exhaust. With the development of sensor technology and material science, researchers have found that Yttrium Stabilized Zirconia (YSZ), a solid electrolyte material has the advantages of high temperature resistance, high humidity resistance, stable chem ical and mechanical properties, etc. Based on this material, gas sensors can not only meet the limit of automobiles confined space on the instrument use, but also can be better suitable for harsh working environments. They are showing great application potential in the field of high-temperature gas detection.
　The theme of this book is the technical research related to gas sensors. The key technologies of mixed potential gas sensors based on YSZ are mainly divided into three aspects: sensitive material, electrochemical reaction process, and device manu facturing process. On the basis of a systematic analysis of the existing research work, the author of this book has extracted the key scientific problems existing in sensors, and has given corresponding solutions and verifications. As an important medium for the identification and conversion of gas information, sensitive material is the prerequisite for gas-sensitive characteristics of NO2 sensors. Firstly, starting
from the research of sensitive material, we have carried out research and innovative design on the components and nanostructures of NO2-sensitive materials, and devel oped a low-cost, easy-to-synthesize, high-sensitivity, and selectivity gas-sensitive nanocomposite material. It has greatly improved the basic performance of NO2 sensors. Secondly, the electrochemical reaction process is an important part of the solid electrolyte gas sensor. Based on the mechanism study of the three-phase reac tion interface constituted by electrolyte, sensitive material, and NO2gas, we innova tively propose a highly efficient, environment-friendly, and controllable micro-nano structure which can build a large specific surface area, and a micro-nano processing method which can increase the number of active sites of electrochemical reaction. It can be applied to optimize the performance of any kind of solid electrolyte sensor. Finally, we focus on the device manufacturing problems which are less discussed in other research work. Through the combination of traditional ceramic material technology and modern MEMS technology, the YSZ mixed potential gas sensor realizes high consistency and batch processing for the first time. It also has low power consumption and is miniaturized. The device has good fiexible and mechan ical characteristics and can be applied to gas in-situ detection in high-temperature pipelines. This work has significantly reduced the dependence of current chemical gas sensors on human labor, and plays a very good role in promoting the sensor manufacturing industry.
　In conclusion, this book introduces an interdisciplinary research result. It combines research achievements in fields such as instrumental science, material science, electrochemistry, and micro-nano electronics. Meanwhile, both theoretical and experimental works have been taken into consideration, and comprehensive inno vative research and detailed demonstration of key technologies of gas sensors have been completed. In this challenging subject, the author of this book has made an outstanding contribution. As a result, the performance and reliability of gas sensors have moved ahead. A new commercial manufacturing scheme for the sensor industry has been explored, taking into account both innovation and practicability. The main purpose of this book is to make the new gas sensor practical as soon as possible. It is also the starting point and direction for future researchers.

Prof. Tianhong Cui

1 Introduction 1
1.1 Background of Research 1
1.1.1 Significance of Fuel-Powered Automobile Exhaust Detection 1
1.1.2 Overview of Gas Sensors 4
1.1.3 Application Status of Exhaust Detection Sensors 7
1.2 Overview of Solid Electrolyte Sensors 11
1.2.1 Research on Solid Electrolyte Material 11
1.2.2 Research on YSZ Material 11
1.2.3 Working Principles and Classification of Solid Electrolyte Gas Sensors 14
1.3 Overview of YSZ-Based Mixed Potential NO2 Sensor 19
1.3.1 Working Principle of YSZ-Based Mixed Potential NO2 Sensor 19
1.3.2 Status Quo of Research on YSZ-Based Mixed Potential NO2 Sensor 21
1.3.3 Shortcomings in the Present Research on YSZ-Based Mixed Potential NO2 Sensor 31
1.4 Main Research in This Paper 33
References 34
2 Research on Optimization of Sensitive Properties of Sensor Electrode Materials 41
2.1 Introduction 41
2.2 Research on Sensitive Materials of Binary Composite Oxide 43
2.2.1 Preparation for Material Synthesis 43
2.2.2 Synthesis and Preparation of Ce/Fe and Ce/Cr Binary Composite Oxides 43
2.2.3 Material Characterization of Ce/Fe and Ce/Cr Binary Composite Oxides 45
2.3 Preparation of Planar NO2 Sensors Based on Ce/Fe and Ce/Cr Sensing Electrodes 51
2.3.1 Sensor Preparation 51
2.3.2 Preparation and Encapsulation of Planar YSZ-Based NO2 Sensors 52
2.4 Performance Testing and Analysis of Ce/Fe, Ce/Cr Composite Oxide NO2 Sensors 53
2.4.1 Testing Methods and Characterization of Sensors 53
2.4.2 Analysis on Experimental Results and Phenomena 56
References 70
3 Research on Enhancement Technique of Sensor Boundary Activity 73
3.1 Introduction 73
3.2 Research on Improvement Technology of Surface Microstructure by Low-Energy Ion Beam Etching 74
3.2.1 Experimental Materials and Equipment 74
3.2.2 Improvement Scheme of Low-Energy Ion Beam for YSZ Surface Microstructures 75
3.2.3 Microstructural Characterization and Analysis of YSZ Surfaces 77
3.3 Preparation and Characterization of NiO Sensing Electrode Materials 79
3.3.1 Preparation for Material Synthesis 81
3.3.2 Synthesis and Preparation of NiO Sensing Materials 81
3.3.3 Characterization of NiO Sensing Electrode Materials 82
3.3.4 Preparation of Planar YSZ-Based NO2 Sensors 83
3.4 Performance Test and Analysis of NO2 Sensors 83
3.5 Summary 91
References 92
4 Research and Development of Flexible Mixed Potential NO2 Sensors with Low Power Consumption 93
4.1 Introduction 93
4.2 Simulation and Design of Integrated Microheaters 94
4.2.1 Presentation and Design of YSZ-Based Microheaters 94
4.2.2 Simulation Results and Analysis of Microheaters 98
4.3 Fabrication and Characterization of Flexible YSZ-Based NO2 Sensors 99
4.3.1 Selection and Preparation of YSZ Film Materials 99
4.3.2 Experimental Materials and Equipment 102
4.3.3 Preparation of YSZ-Based NO2 Sensors with the Sandwich Structure 102
4.3.4 Fabrication Process Characterization of the Sensor 106
4.4 Performance Test and Analysis of Mixed Potential NO2 Sensors 108
4.4.1 Test Methods and Characterization of Sensors 108
4.4.2 Experimental Results and Phenomenon Analysis 110
4.5 Summary 117
References 118
5 Summary and Prospects 119
5.1 Summary of this Paper 119
5.2 Research Prospects 122

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